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Nano-hardness investigations of thin films by an atomic force microscope

✍ Scribed by G. Persch; Ch. Born; B. Utesch

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
650 KB
Volume
24
Category
Article
ISSN
0167-9317

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## Abstract The atomic force acoustic microscopy (AFAM) technique has been used to determine elastic properties of films with thicknesses decreasing from several hundreds of nanometers to several nanometers. It has been shown that metal films as thin as 50 nm can be characterized directly without t