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Atomic force microscopy nanolithography: fabrication of metallic nano-slits using silicon nitride tips

✍ Scribed by KÃ¶nig, Tobias; Papke, Thomas; Kopyshev, Alexey; Santer, Svetlana

Book ID: 120251288
Publisher: Springer
Year: 2013
Tongue: English
Weight: 510 KB
Volume: 48
Category: Article
ISSN: 0022-2461
DOI: 10.1007/s10853-013-7188-x

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