✦ LIBER ✦
Silicon sensors with integral tips for atomic force microscopy: a novel single-mask fabrication process: Farooqui, M. M.; Evans, A. G. R. Journal of Micromechanics and Microengineering. 1993 Mar
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 136 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0141-6359
No coin nor oath required. For personal study only.