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Electrochemical nanolithography using scanning probe microscopy: fabrication of patterned metal structures on silicon substrates

✍ Scribed by Hiroyuki Sugimura; Nobuyuki Nakagiri

Book ID: 113205392
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 995 KB
Volume: 281-282
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(96)08716-0

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