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Argon ion etching in a reactive gas

✍ Scribed by M. Cantagrel; M. Marchal

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

✍ M. Cantagrel; M. Marchal 📂 Article 📅 1973 🏛 Springer 🌐 English ⚖ 529 KB

Reactive Ion-Beam Etching of Thick Polyi

✍ A. I. Stognij; Yu. V. Timoshkov; T. I. Orekhovskaya; S. V. Koryakin; E. V. Lobko 📂 Article 📅 2001 🏛 Springer 🌐 English ⚖ 561 KB

Etching characteristics of LiNbO 3 cryst

✍ Tamura, Masashi; Yoshikado, Shinzo 📂 Article 📅 2001 🏛 Institute of Physics and National Institute of Mat 🌐 English ⚖ 634 KB

Reactive ion-etching-induced damage in s

✍ Arora, B. M. 📂 Article 📅 1987 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 752 KB

Reactant supply in reactive ion etching

📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 164 KB

Reactive ion etching in microcircuit fab

✍ P.M. Schaible; G.C. Schwartz 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 91 KB