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Reactive ion etching in microcircuit fabrication

✍ Scribed by P.M. Schaible; G.C. Schwartz

Publisher: Elsevier Science
Year: 1981
Tongue: English
Weight: 91 KB
Volume: 83
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(81)90664-7

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