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Fabrication of sharp silicon tips employing anisotropic wet etching and reactive ion etching

✍ Scribed by M.A.R. Alves; D.F. Takeuti; E.S. Braga

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 230 KB
Volume: 36
Category: Article
ISSN: 0026-2692
DOI: 10.1016/j.mejo.2004.10.004

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