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Reactant supply in reactive ion etching

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📜 SIMILAR VOLUMES

Microwave etching device for reactive io

✍ H. Schmid 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 753 KB

Reactive ion etching in microcircuit fab

✍ P.M. Schaible; G.C. Schwartz 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 91 KB

Microloading effect in reactive ion etch

✍ C. Hedlund 📂 Article 📅 1994 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 641 KB

Reactive ion etching of silicon

📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 164 KB

Reactive ion etching for VLSI

✍ Ephrath, L.M. 📂 Article 📅 1981 🏛 IEEE 🌐 English ⚖ 733 KB

Reactive ion etching and plasma etching

✍ P. Verdonck; G. Brasseur; J. Swart 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 313 KB