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Ar-dilution effects on the elastic and structural properties of hydrogenated hard carbon films deposited by plasma-enhanced chemical vapor deposition

✍ Scribed by Valentini, L; Kenny, J.M; Mariotto, G; Tosi, P; Carlotti, G; Fioretto, D; Lozzi, L; Santucci, S

Book ID: 123073781
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 113 KB
Volume: 10
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(00)00391-5

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