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Application of SiO2 aerogel film with low dielectric constant to intermetal dielectrics

โœ Scribed by Moon-Ho Jo; Jung-Kyun Hong; Hyung-Ho Park; Joong-Jung Kim; Sang-Hoon Hyun; Se-Young Choi

Book ID
114086208
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
292 KB
Volume
308-309
Category
Article
ISSN
0040-6090

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Evaluation of SiO2 aerogel thin film wit
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โœ Moon-Ho Jo; Jung-Kyun Hong; Hyung-Ho Park; Joong-Jung Kim; Sang-Hun Hyun ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 316 KB

The material and dielectric properties of SiO 2 aerogel thin films were studied. These films were fabricated by spin coating and a subsequent supercritical drying method. Film porosity was evaluated as 67% with Rutherford backscattering spectrometry and its dielectric constant was measured to be 2.1

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