Ambient-dried low dielectric SiO2 aerogel thin film
โ Scribed by Hee-Sun Yang; Se-Young Choi; Sang-Hoon Hyun; Hyung-Ho Park; Jung-Kyun Hong
- Book ID
- 117148528
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 330 KB
- Volume
- 221
- Category
- Article
- ISSN
- 0022-3093
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๐ SIMILAR VOLUMES
The material and dielectric properties of SiO 2 aerogel thin films were studied. These films were fabricated by spin coating and a subsequent supercritical drying method. Film porosity was evaluated as 67% with Rutherford backscattering spectrometry and its dielectric constant was measured to be 2.1
SiO aerogel film has a promising property as intermetal dielectrics (IMD) for its low dielectric constant. 2 However, a stable and porous SiO aerogel film was not properly synthesized due to the rapid evaporation of 2 solvent during spin coating even in a solvent saturated atmosphere. So less evapor