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Ambient pressure dried SiO2 aerogel film on GaAs for application to interlayer dielectrics

✍ Scribed by Sung-woo Park; Sang-bae Jung; Jun-kyu Yang; Hyung-ho Park; Hae-cheon Kim

Book ID: 114085498
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 383 KB
Volume: 420-421
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(02)00818-0

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