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Application of amorphous CuâZr binary alloy as a diffusion barrier in Cu/Si contact systems

✍ Scribed by Takeyama, Mayumi; Kagomi, Shinya; Noya, Atsushi; Sakanishi, Kouichirou; Sasaki, Katsutaka

No coin nor oath required. For personal study only.

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Application of amorphous CuâZr binary alloy as a diffusion barrier in Cu/Si contact systems