✦ LIBER ✦
Preparation of CuTi-Cu3Ti compound alloy films and their applications as diffusion barrier in Cu/CuTi-Cu3Ti/TiN/Si multilayered contact system
✍ Scribed by Ken-Ichi Yoshimoto; Katsutaka Sasaki; Hideto Yanagisawa; Atsushi Noya
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 629 KB
- Volume
- 79
- Category
- Article
- ISSN
- 8756-663X
No coin nor oath required. For personal study only.