✦ LIBER ✦

High temperature stability of Zr–Si–N diffusion barrier in Cu/Si contact system

✍ Scribed by Ying Wang; Changchun Zhu; Zhongxiao Song; Ying Li

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Diffusion barrier performance of Zr–N/Zr

✍ Ying Wang; Fei Cao; Ming-hui Ding; Yun-tao Liu 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 412 KB

Non-crystalline Zr–Si diffusion barrier

✍ Ying Wang; Fei Cao; Xiao-dong Yang; Zhong-xiao Song 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 362 KB

Effect of substrate temperature on the t

✍ Ying Wang; Chunhui Zhao; Fei Cao; Lei Shao 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 614 KB

WITHDRAWN: Effect of substrate temperatu

✍ Ying Wang; Chunhui Zhao; Fei Cao; Lei Shao 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 767 KB

Application of amorphous CuâZr binary

✍ Takeyama, Mayumi; Kagomi, Shinya; Noya, Atsushi; Sakanishi, Kouichirou; Sasaki, 📂 Article 📅 1996 🏛 American Institute of Physics 🌐 English ⚖ 258 KB

Effect of annealing ambient on the therm

✍ Ying Wang; Changchun Zhu; Zhongxiao Song; Chunyu Wu 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 355 KB