Non-crystalline Zr–Si diffusion barrier for Cu/Si contact system under different sputtering power

✍ Scribed by Ying Wang; Fei Cao; Xiao-dong Yang; Zhong-xiao Song

• Book ID: 116671995
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 362 KB
• Volume: 355
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/j.jnoncrysol.2009.09.019