Barrier capability of Zr–N films with different density and crystalline structure in Cu/Si contact systems

✍ Scribed by Ying Wang; Chun-hui Zhao; Fei Cao; Da-wei Yang

• Book ID: 113792138
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 463 KB
• Volume: 62
• Category: Article
• ISSN: 0167-577X
• DOI: 10.1016/j.matlet.2008.04.058