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Application of 3D gray mask for the fabrication of curved SU-8 structures

✍ Scribed by Kuo-Yung Hung; Fan-Gang Tseng; Hwai-Pwu Chou

Publisher: Springer-Verlag
Year: 2005
Tongue: English
Weight: 402 KB
Volume: 11
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-004-0458-4

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