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A micromachined, shadow-mask technology for the OMVPE fabrication of integrated optical structures

โœ Scribed by G. M. Peake; L. Zhang; N. Y. Li; A. M. Sarangan; C. G. Willison; R. J. Shul; S. D. Hersee


Publisher
Springer US
Year
2000
Tongue
English
Weight
304 KB
Volume
29
Category
Article
ISSN
0361-5235

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