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Improved micromachining of all SU-8 3D structures for a biologically-inspired flying robot

✍ Scribed by X.Q. Bao; T. Dargent; S. Grondel; J.B. Paquet; E. Cattan


Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
912 KB
Volume
88
Category
Article
ISSN
0167-9317

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