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Annealing kinetics and reversibility of stress-induced leakage current in thin oxides

✍ Scribed by Riess, P.; Ghibaudo, G.; Pananakakis, G.; Brini, J.

Book ID: 120914257
Publisher: American Institute of Physics
Year: 1998
Tongue: English
Weight: 299 KB
Volume: 72
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.121534

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