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Annealing Effects on RF Sputter Deposited a-Si/a-C Multilayers

✍ Scribed by Ech-chamikh, E.; Essafti, A.; Azizan, M.; Debbagh, F.; Ijdiyaou, Y.

Book ID: 121262857
Publisher: Trans Tech Publications Inc.
Year: 2009
Tongue: English
Weight: 262 KB
Volume: 4
Category: Article
ISSN: 1661-9897
DOI: 10.4028/www.scientific.net/JNanoR.4.103

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