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Anisotropic characteristics and morphological control of silicon nanowires fabricated by metal-assisted chemical etching

✍ Scribed by Liu, Kong; Qu, Shengchun; Zhang, Xinhui; Wang, Zhanguo


Book ID
118801441
Publisher
Springer
Year
2012
Tongue
English
Weight
837 KB
Volume
48
Category
Article
ISSN
0022-2461

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## Abstract Silicon nanowires (SiNWs) and nanopillars have been obtained by metal‐assisted etching (MAE), starting from silver thin films deposited by thermal evaporation and sputtering on silicon substrates. Different deposition methods and thickness are strongly affecting spatial distribution and