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Ordered silicon nanowires prepared by template-assisted morphological design and metal-assisted chemical etching

✍ Scribed by Liu, Kong; Qu, Shengchun; Tan, Furui; Bi, Yu; Lu, Shudi; wang, Zhanguo


Book ID
120182542
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
578 KB
Volume
101
Category
Article
ISSN
0167-577X

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## Abstract Silicon nanowires (SiNWs) and nanopillars have been obtained by metal‐assisted etching (MAE), starting from silver thin films deposited by thermal evaporation and sputtering on silicon substrates. Different deposition methods and thickness are strongly affecting spatial distribution and