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Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching

✍ Scribed by Ruiyuan Liu, Fute Zhang, Celal Con, Bo Cui, Baoquan Sun

Book ID: 120947642
Publisher: Springer-Verlag
Year: 2013
Tongue: English
Weight: 605 KB
Volume: 8
Category: Article
ISSN: 1931-7573
DOI: 10.1186/1556-276X-8-155

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