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Triangle pore arrays fabricated on Si (111) substrate by sphere lithography combined with metal-assisted chemical etching and anisotropic chemical etching

✍ Scribed by Hidetaka Asoh, Kosuke Fujihara, Sachiko Ono


Book ID
119906035
Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
699 KB
Volume
7
Category
Article
ISSN
1931-7573

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