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Analysis of X-ray rocking curves in (0 0 1) silicon crystals implanted with nitrogen by plasma immersion ion implantation

✍ Scribed by E Abramof; A.F Beloto; M Ueda; G.F Gomes; L.A Berni; H Reuther

Book ID: 114171781
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 190 KB
Volume: 161-163
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(99)00752-1

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Analysis of X-ray rocking curves in (0&#xa0;0&#xa0;1) silicon crystals implanted with nitrogen by plasma immersion ion implantation

Analysis of X-ray rocking curves in (0 0 1) silicon crystals implanted with nitrogen by plasma immersion ion implantation