✦ LIBER ✦

Analysis of the ohmic contacts of Ti/Al/Ni/Au to AlGaN/GaN HEMTs by the multi-step annealing process

✍ Scribed by Yan, Wei; Zhang, Renping; Du, Yandong; Han, Weihua; Yang, Fuhua

Book ID: 118190633
Publisher: IOP Publishing
Year: 2012
Tongue: English
Weight: 387 KB
Volume: 33
Category: Article
ISSN: 1674-4926
DOI: 10.1088/1674-4926/33/6/064005

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ohmic contact formation of Ti/Al/Ni/Au t

Ohmic contact formation of Ti/Al/Ni/Au to n-GaN by two-step annealing method

✍ Z.Z Chen; Z.X Qin; C.Y Hu; X.D Hu; T.J Yu; Y.Z Tong; X.M Ding; G.Y Zhang 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 157 KB

Electrical Characterization and Surface

Electrical Characterization and Surface Morphology of Optimized Ti∕Al∕Ti∕Au Ohmic Contacts for AlGaN∕GaN HEMTs

✍ Bardwell, J. A.; Haffouz, S.; Tang, H.; Wang, R. 📂 Article 📅 2006 🏛 The Electrochemical Society 🌐 English ⚖ 399 KB

Role of Ti/Al relative thickness in the

Role of Ti/Al relative thickness in the formation mechanism of Ti/Al/Ni/Au Ohmic contacts to AlGaN/GaN heterostructures

✍ Kong, Xin; Wei, Ke; Liu, Guoguo; Liu, Xinyu 📂 Article 📅 2012 🏛 Institute of Physics 🌐 English ⚖ 974 KB

Correlation between microstructure and t

Correlation between microstructure and temperature dependent electrical behavior of annealed Ti/Al/Ni/Au Ohmic contacts to AlGaN/GaN heterostructures

✍ Iucolano, Ferdinando; Greco, Giuseppe; Roccaforte, Fabrizio 📂 Article 📅 2013 🏛 American Institute of Physics 🌐 English ⚖ 812 KB

Analysis on the new mechanisms of low re

Analysis on the new mechanisms of low resistance stacked Ti/Al Ohmic contact structure on AlGaN/GaN HEMTs

✍ Gong, Rumin; Wang, Jinyan; Dong, Zhihua; Liu, Shenghou; Yu, Min; Wen, Cheng P; H 📂 Article 📅 2010 🏛 Institute of Physics 🌐 English ⚖ 920 KB

Transmission electron microscopy assessm

Transmission electron microscopy assessment of the Si enhancement of TiâAlâNiâAu Ohmic contacts to undoped AlGaNâGaN heterostructures

✍ Desmaris, Vincent; Shiu, Jin-Yu; Lu, Chung-Yu; Rorsman, Niklas; Zirath, Herbert; 📂 Article 📅 2006 🏛 American Institute of Physics 🌐 English ⚖ 999 KB