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Analysis of residual stress in diamond films by x-ray diffraction and micro-Raman spectroscopy

✍ Scribed by Ferreira, N. G.; Abramof, E.; Leite, N. F.; Corat, E. J.; Trava-Airoldi, V. J.

Book ID
120730890
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
607 KB
Volume
91
Category
Article
ISSN
0021-8979

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πŸ“œ SIMILAR VOLUMES

Residual stresses and crystalline qualit
Residual stresses and crystalline quality of heavily boron-doped diamond films analysed by micro-Raman spectroscopy and X-ray diffraction
✍ N.G Ferreira; E Abramof; E.J Corat; V.J Trava-Airoldi πŸ“‚ Article πŸ“… 2003 πŸ› Elsevier Science 🌐 English βš– 124 KB

X-ray diffraction analysis and micro-Raman spectroscopy measurements have been used for stress studies on HFCVD 18 21 diamond films with different levels of boron doping. The boron incorporation in the film varied in the range 10 -10 3 boron / cm . The grain size, obtained from SEM images, showed gr