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Micro-Raman spectroscopy and X-ray diffraction studies of atomic-layer-deposited ZrO2and HfO2thin films

✍ Scribed by S. N. Tkachev; M. H. Manghnani; A. Niilisk; J. Aarik; H. Mändar

Publisher
Springer
Year
2005
Tongue
English
Weight
698 KB
Volume
40
Category
Article
ISSN
0022-2461

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