Micro-raman stress investigations and X-ray diffraction analysis of polycrystalline diamond (PCD) tools
β Scribed by Catledge, Shane A.; Vohra, Yogesh K.; Ladi, Ram; Rai, Ghanshyam
- Book ID
- 122468394
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 572 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0925-9635
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π SIMILAR VOLUMES
X-ray diffraction analysis and micro-Raman spectroscopy measurements have been used for stress studies on HFCVD 18 21 diamond films with different levels of boron doping. The boron incorporation in the film varied in the range 10 -10 3 boron / cm . The grain size, obtained from SEM images, showed gr
## Abstract The nonβdestructive characterization of intrinsic stress is very important to evaluate the reliability of devices based on diamondβlike carbon (DLC) films. Whereas the only requirement for the Xβray diffraction method is a crystalline state of specimen, Raman spectroscopic stress analys