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Analysis of intrinsic stress distribution in grains of high quality CVD diamond film by micro-Raman spectroscopy

โœ Scribed by I.I Vlasov; V.G Ralchenko; E.D Obraztsova; A.A Smolin; V.I Konov


Book ID
114086200
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
428 KB
Volume
308-309
Category
Article
ISSN
0040-6090

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Residual stresses and crystalline qualit
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X-ray diffraction analysis and micro-Raman spectroscopy measurements have been used for stress studies on HFCVD 18 21 diamond films with different levels of boron doping. The boron incorporation in the film varied in the range 10 -10 3 boron / cm . The grain size, obtained from SEM images, showed gr