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Analysis of interface layers by spectroscopic ellipsometry

✍ Scribed by T.J. Kim; J.J. Yoon; Y.D. Kim; D.E. Aspnes; M.V. Klein; D.-S. Ko; Y.-W. Kim; V.C. Elarde; J.J. Coleman


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
282 KB
Volume
255
Category
Article
ISSN
0169-4332

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