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An examination of the reactive sputtering of silicon nitride on to gallium arsenide

✍ Scribed by DC Bartle; DC Andrews; JD Grange; AD Trigg; DK Wickenden

Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 335 KB
Volume: 33
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(83)90660-7

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