Laser-induced deposition of aluminium on gallium arsenide and silicon nitride from trimethylamine alane

✍ Scribed by T. Frugier; A. Boulahia; A. Sayah; D. Tonneau; J.E. Bourée; J.M. Siffre; D. Mencaraglia

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 494 KB
• Volume: 69
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(93)90523-e