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An analysis technique for extraction of thin film stresses from x-ray data

✍ Scribed by Cornella, Guido; Lee, Seok-Hee; Nix, William D.; Bravman, John C.

Book ID: 121850399
Publisher: American Institute of Physics
Year: 1997
Tongue: English
Weight: 303 KB
Volume: 71
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.120225

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