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Amorphous WO3 Films via “Wet” CVD of a WVI Oxoalkoxide Precursor

✍ Scribed by M. Basato; E. Brescacin; E. Tondello


Publisher
John Wiley and Sons
Year
2001
Tongue
English
Weight
450 KB
Volume
7
Category
Article
ISSN
0948-1907

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✍ Agnieszka Walkiewicz-Pietrzykowska; Aleksander M. Wrobel; Bartosz Glebocki 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 272 KB 👁 1 views

## Abstract The surface morphology and physical (density), optical (refractive index), and mechanical (hardness, elasticity) properties of amorphous hydrogenated silicon carbide (a‐SiC:H) films produced by remote microwave hydrogen plasma (RHP)CVD from a triethylsilane precursor are investigated. T