ChemInform Abstract: Amorphous WO3 Films via “Wet” CVD of a WVI Oxoalkoxide Precursor.
✍ Scribed by Marino Basato; Enrico Brescacin; Eugenio Tondello
- Publisher
- John Wiley and Sons
- Year
- 2010
- Weight
- 35 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0931-7597
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Deposition of Thin Films of Gallium Sulfide from a Novel Liquid Single-Source Precursor, Ga(SOCNEt 2 ) 3 , by Aerosol-Assisted CVD. -The novel liquid gallium monothiocarbamato complex (III) is utilized as a single-source precursor for the deposition of face-centered cubic GaS films on glass substra