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Amorphous Silicon Passivation of Surfaces Promoting Epitaxy

✍ Scribed by Mews, Mathias; Schulze, Tim F.; Mingirulli, Nicola; Korte, Lars

Book ID: 123109080
Publisher: Elsevier
Year: 2013
Weight: 186 KB
Volume: 38
Category: Article
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2013.07.356

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