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Silicon surface passivation by metal layers for low-temperature epitaxy

✍ Scribed by Jürgen Kühnle; Ralf Bergmann; Jürgen H. Werner; Martin Albrecht

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 249 KB
Volume: 163
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(95)01004-1

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