Surface Passivation of Crystalline and Polycrystalline Silicon Using Hydrogenated Amorphous Silicon Oxide Film

✍ Scribed by Sritharathikhun, Jaran; Banerjee, Chandan; Otsubo, Michio; Sugiura, Tsutomu; Yamamoto, Hiroshi; Sato, Takehiko; Limmanee, Amornrat; Yamada, Akira; Konagai, Makoto

• Book ID: 121472138
• Publisher: Institute of Pure and Applied Physics
• Year: 2007
• Tongue: English
• Weight: 296 KB
• Volume: 46
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.46.3296