AFM fabrication of metal-oxide devices with in situ control of electrical properties

✍ Scribed by E.S. Snow; P.M. Campbell

• Book ID: 103942700
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 305 KB
• Volume: 227
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/0921-4526(96)00420-6

✦ Synopsis

Metal wires and metal-oxide metal junctions were fabricated by anodic oxidation with a conducting atomic force microscope tip. The width of the wires and resistance of the junctions were controlled by real-time, in situ measurement of the device resistance during fabrication. Since the device properties of nanometer-scale structures are very sensitive to size variations, such measurements provide a more accurate method of controlling device properties than by controlling geometry alone.