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Advanced materials for microelectronics: ferroelectric and low-k dielectrics

✍ Scribed by I. Fragalà

Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 45 KB
Volume: 5
Category: Article
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(02)00072-0

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