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Si-based Materials for Advanced Microelectronic Devices: Synthesis, Defects and Diffusion

✍ Scribed by Enrico Napolitani; Andrej Kuznetsov; Wolfgang Skorupa; Majeed Foad

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 78 KB
Volume: 253
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.10.003

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