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Acoustic spectroscopy and electrical characterization of Si/NAOS-SiO2/HfO2 structures

✍ Scribed by Bury, Peter; Matsumoto, Taketoshi; Bellan, Ivan; Janek, Marián; Kobayashi, Hikaru

Book ID: 122780925
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 608 KB
Volume: 269
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2012.10.103

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