𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Accurate characterisation of silicon nitride films on rough silicon surfaces by ellipsometry

✍ Scribed by S.C. Siah; B. Hoex; A.G. Aberle

Book ID
116425604
Publisher
Elsevier
Year
2011
Weight
435 KB
Volume
8
Category
Article
ISSN
1876-6102

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Characterisation of rough silicon surfac
Characterisation of rough silicon surfaces using spectroscopic ellipsometry, reflectance, scanning electron microscopy and scattering measurements
✍ C. Pickering; R. Greef; A.M. Hodge πŸ“‚ Article πŸ“… 1990 πŸ› Elsevier Science 🌐 English βš– 423 KB

A critical comparison of several techniques for the evaluation of imperfections in sificon-onsapphire (SOS) wafers leads to the adoption of a model of the SOS surface based on an effective medium approximation treatment of the ellipsometric" results.