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Structural and Chemical Analysis of a Silicon Nitride Film on GaAs by Null Ellipsometry

✍ Scribed by Alterovitz, S. A. ;Bu-Abbud, G. H. ;Woollam, J. A. ;Liu, D. C.

Publisher
John Wiley and Sons
Year
1984
Tongue
English
Weight
417 KB
Volume
85
Category
Article
ISSN
0031-8965

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