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On the Characterization of Silicon Dioxide and Silicon Nitride by Spectroscopic Ellipsometry in the VIS and IR Regions

✍ Scribed by Zettler, J.-Th. ;Weidner, M. ;Röseler, A.


Publisher
John Wiley and Sons
Year
1991
Tongue
English
Weight
416 KB
Volume
124
Category
Article
ISSN
0031-8965

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