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Chemical and structural analysis by ellipsometry and x-ray reflectometry of thin sulfide layers grown on InP

✍ Scribed by M. Gendry; J. Durand; M. Erman; J.B. Theeten; L. Nevot; B. Pardo


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
746 KB
Volume
44
Category
Article
ISSN
0169-4332

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✍ S.F. Yoon; P.H. Zhang; H.Q. Zheng πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 516 KB

We have investigated the effect of substrate temperature (Ts varied from 410 to 560Β°C) on the crystalline and optical properties of In l\_x\_rGaxAlyAs layers grown on InP substrates by molecular beam epitaxy (MBE). The quaternary samples were analysed using double axis X-ray diffraction (XRD), low t