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Accuracy of calibrated depth by delta-doped reference materials in shallow depth profiling

✍ Scribed by M. Tomita; H. Tanaka; M. Koike; T. Kinno; Y. Hori; N. Yoshida; T. Sasaki; S. Takeno

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 430 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.05.005

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